PHYSICAL QUANTITY SENSOR

专利名称：PHYSICAL QUANTITY SENSOR发明人：KANAMARU Masatoshi,HAYASHI

Masahide,YURA Masashi,JEONG Heewon

申请号：EP15840211.5申请日：20150629公开号：EP3193176A4公开日：20180516

摘要：For a small sensor produced through a MEMS process, when an electrode pad,wiring, or a shield layer is formed in a final step, it is difficult to nondestructivelyinvestigate whether a structure for sensing a physical quantity has been processedsatisfactorily. In the present invention, in a physical quantity sensor formed from anMEMS structure, in a structure in which a surface electrode having through wiring isformed on the surface of an electrode substrate and the periphery thereof is insulated,forming a shield layer comprising a metallic material on the surface of the electrodesubstrate in a planar view and providing a space for internal observation inside the shieldlayer makes it possible to check for internal defects.

申请人：Hitachi Automotive Systems, Ltd.

地址：2520 Takaba Hitachinaka-shi, Ibaraki 312-8503 JP

国籍：JP

代理机构：MERH-IP Matias Erny Reichl Hoffmann Patentanwälte PartG mbB

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