OPTICAL IMAGE MEASURING INSTRUMENT

专利名称：OPTICAL IMAGE MEASURING INSTRUMENT发明人：CHAN, Kinpui,AKIBA, Masahiro,FUKUMA,

Yasufumi,TSUKADA, Hisashi

申请号：EP06823105.9申请日：20061107公开号：EP1970694B1公开日：20140514

摘要：An optical image measuring instrument capable of shorting the measurementtime. A flash is outputted from a xenon lamp (2) and converted into a wide-band light bymeans of an optical filter (2A). The flash is converted into a linearly polarized light bymeans of a polarizing plate (3). The linearly polarized light is divided into a signal light (S)and a reference light (R) by means of a semitransparent mirror (6). The reference light (R)is converted into a circularly polarized light by means of a wavelength plate (7). Thesignal light (S) and the reference light (R) are combined by means of a semitransparentmirror (6) to produce an interference light (L). A CCD (23) detects the interference lighthaving the same characteristic as the interference light (L). The interference light (L) isseparated into an S-polarized component (L1) and a P-polarized component (L2) bymeans of a polarized beam splitter (11). These components are detected by means ofCCDs (21, 22). A computer (30) creates an image of an object (O) to be measured from thedetection signals from the CCds (21, 22, 23). Wit such an optical image measuringinstrument (1), since two polarized components (L1, L2) of the interference light (L) canbe simultaneously obtained, the measurement time can be shortened.

申请人：KABUSHIKI KAISHA TOPCON

代理机构：Gagel, Roland

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