专利名称：Method and apparatus for vibration
reduction in laser system line narrowing unitwavelength selection optical element
发明人：Efrain Figueroa申请号：US12002939申请日：20071218公开号：US07659529B2公开日：20100209
专利附图：
摘要：A method and apparatus is disclosed that may comprise an ultraviolet lightsource; an optical element within an optical path of the light source mounted on an
optical element mount; a vibration damping mechanism operatively connected to theoptical element or to the mount which may comprise a wire mesh pad. The opticalelement may comprise a center wavelength selection optical element, which maycomprise a grating, a mirror, or a prism. The vibration damping mechanism may comprisethe wire mesh pad comprising an elastic interface between a driving mechanism lever armoperable to move the optical element or the mount and a driving lever arm actuator. Thevibration damping mechanism may comprise a mass damping mechanism comprising amounting plate connected to the optical element or to the mount; a damping mass; thewire mesh pad comprising an elastic interface between the mounting plate and thedamping mass.
申请人：Efrain Figueroa
地址：San Diego CA US
国籍：US
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