专利名称：Vacuum Evaporation Apparatus发明人：Xiyuan Wang,Bin Bu,Gu Yao申请号：US15153346申请日：20160512
公开号：US20160362778A1公开日：20161215
专利附图：
摘要：A vacuum evaporation apparatus comprises a housing, in which a main vacuumcavity, a side vacuum cavity and a switch assembly are disposed. The main vacuum cavity isconfigured for vacuum evaporation. A tomography detection module for scanning acrucible to be measured and a manipulator for accessing a crucible in main vacuum cavity
are disposed in the side vacuum cavity. A switch assembly is disposed between the mainvacuum cavity and the side vacuum cavity. Where the switch assembly is opened, the mainvacuum cavity and the side vacuum cavity are communicated with each other to enableaccessing the crucible. Where the switch assembly is closed, the main vacuum cavity andthe side vacuum cavity are separated from each other.
申请人：BOE Technology Group Co., Ltd.,Hefei Xinsheng Optoelectronics TechnologyCo., Ltd.
地址：Beijing CN,Anhui CN
国籍：CN,CN
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